Title: Course Announcement
Date: September 6, 2013
- EEE 4421C Introduction to Nanofabrication
- EEE 5427C Advanced Nanofabrication
Also cross-listed
- EGN 4012C Introduction to Nanoscale Processing Technologies
- EGN 5013C Nanoscale Fabrication and Synthesis
TERM: Fall 2013
- TIME: Monday 11:00am – 1:00pm
- CLASSROOM: EC 1113
- LAB: 2 hours per week (TBA)
- INSTRUCTORS: Nezih Pala (ECE, contact: npala@fiu.edu ), Chunlei Peggy Wang (MME)
- PREREQUISITES: Instructor’s permission.
- TEXTBOOKS: Introduction to Microfabrication, 2010, Sami Franssila (Recommended, not mandatory)
Nanofabrication is the most important component in developing and manufacturing micro and nanosystems, such as: microelectronics, biochips, microfluidic lab on a chip, MEMS/NEMS, integrated optical circuits, high- frequency and optoelectronic, micromagnetic devices, microsensors, etc. These courses will provide necessary and solid training to students to gain hands-on experience in design and fabrication of micro and nano-systems. They include lab sessions where the students design, fabricate and test micro-scale pressure sensors. The students will be certified to have access to FIU’s Motorla Nanofabrication Research Facility for future use.
Topics covered
- Introduction to nanofabrication tools, environment and methods
- Thin film materials and processes
- Layout design and pattern generation
- Optical and advanced lithography techniques
- Etching
- Oxidation
- Diffusion
- Ion implantation
- Micrometrology and characterization